Ion microprobe – Analysis and modification of materials with energetic ions

V. Havránek

 Nuclear Physics Institute of the Czech Academy of Sciences, v. v. i., 250 68 Rez, Czech Republic

havranek@ujf.cas.cz

Accelerated energetic ions (in MeV region) are well suited both for analysis and modification of materials in in large variety of applications. They are based on knowledge of basic principles of energetic ion interaction with matter [1] as electronic and nuclear stopping power, inner and valence atomic shells ionization, elastic and inelastic scattering on atomic nuclei, nuclear reactions, radiation damage, ion and molecular sputtering and many others. Most common source of accelerated ions is a small electrostatic accelerator which enables us to adjust ion beam of exact ion type, ion energy and beam size or beam current. A beam of accelerated ions can be further focused by set of active elements (as collimators and quadrupoles) down to micro-meter or even nano-meter size and scanned over the sample. This arrangement is called ion (or nuclear) micro-beam and it is now installed on many of small accelerators in the world (not confuse with focused ion beams which are in lower energy range).

The most common ion beam analytical methods are RBS (Rutherford Backscattering Spectroscopy), PIXE (Particle Induced X-ray Emission), PIGE (Particle Induced Gamma-Ray Emission), ERDA (Energy Recoil Detection Analysis), NRA (Nuclear Reaction Analysis) and High energy ion implantation. But there are many others as IBIL (Ion Beam Induced Luminescence), IBIC (Ion Beam Induced Current), High energy SIMS etc. At nuclear microprobe, the STIM (Scanning Transmission Ion Microscopy) and IBW (Ion Beam Writing) methods are also frequently used. With suitable rotational stage, the sub micrometer tomography in PIXE (elemental distribution) and STIM (electron density) mode can be performed as well. Usually more methods can be introduced simultaneously during one sample measurement.          

Tandetron examples

The two ion beam lines (on right side) on 3MV Tandeteron 4130MC are dedicated to multipurpose broad beam target chamber with possibility of simultaneous PIXE, PIGE, RBS and PESA (ERDA) analysis and for ion microbeam with 1µm resolution and around 2mm scan area (depending on energy and ion type). Both lines are used for multidisciplinary research in variety of different fields including environmental, material, biological, geological, medical, cultural heritage and other applications. The lines are also offer to general scientific community under open access policy covered by CANAM (LM 2011019) project. Some examples of interesting applications of micro and broad beam will be presented, including investigation of mercury content in Tycho Brahe hair [2], measurement of elemental content and distribution in ancient ceramic shreds and preparation of different optical and mechanical microstructures by IBW method with protons and heavier ions [3-4]. 

1.  Y. Wang and M. Nastasi, Handbook of Modern Ion Beam Materials Analysis, Second Edition, Materiále Research Society, Warendale, Pensylvania 2009.

2.  K. L. Rasmussen, J. Kucera, L. Skytte, J. Kamenik, V. Havranek, J. Smolik, P. Veleminsky, J. Bruzek, J. Vellev, Archaeometry 55/6, (2013), 1187-1195.

3.  M. Cutroneo, V. Havránek, A. Macková, V. Semian, L. Torrisi, L. Calcagno, Nucl. Instr. Methods  B  371, (2016), 344 – 349.

 4.  I. Banyasz, I. Rajta, G.U.L. Nagy, Z. Zolnai, V. Havranek, S. Pelli, M. Veres, S. Berneschi,G. Nunzi-Conti, G.C. Righini, Nucl. Instr. Methods  B 331, (2014), 157-162.