Crystal X-ray optics for metrology and imaging

M. Jergel1, K. Végső1, P. Šiffalovič1, Y. Halahovets1, D. Korytár2, Z. Zápražný2, P. Vagovič3

1Institute of Physics SAS, Dúbravská cesta 9, 845 11 Bratislava, Slovakia

2Institute of Electrical Engineering SAS, Dúbravská cesta 9, 841 04 Bratislava, Slovakia

3Center for Free-Electron Laser Science, Luruper Chaussee 149, 22761 Hamburg, Germany

matej.jergel@savba.sk

The contribution deals with crystal X-ray optics based on V-shaped channel-cut monochromators that possess additional functionality of the beam footprint control with direct implications for the X-ray metrology and imaging. The main limitation stems from the refraction effect that reduces severely the output intensity for high compression/expansion ratios due to a poor rocking curve matching of the two diffractors. In the contribution, two types of monochromators with different approaches to solving this issue were tested both in the compression and expansion modes with a laboratory microfocus X-ray source. The X-ray scattering and imaging experiments show that these X-ray optics elements provide a promising alternative with several advantages as compared to traditional measurement schemes.

 

Longer paper submitted