F055

Struktura povrchu a tenkych vrstev

1/0 Zk - Letni nebo zimni semestr

R. Kužel

A. STRUKTURA POVRCHU

Vyznam studia povrchu, povrchova relaxace a rekonstrukce, dvojrozmerne Bravaisovy mriže, Woodsovo znaceni, maticove znaceni, nerovinne povrchy (schody a fazety), povrchove struktury, difrakce na povrchu (dvojrozmerne mriži), Ewaldova konstrukce, popis difrakcnich svazku

B. METODY STUDIA STRUKTURY POVRCHU A TENKYCH VRSTEV.

Metody pripravy cistych povrchu pro experimenty.

1. Difrakce elektronu a pozitronu
   • LEED (zakladni charakteristiky a princip, experimentalni usporadani, rozptyl elektronu krystalem; nastin kvantove-mechanickych vypoctu, mnohonasobny rozptyl, poruchy na povrchu, schody, fazove prechody)
   • Teplotni efekty a dynamika povrchu (Debyeuv-Walleruv faktor, anizotropie kmitu, kmity adsorbovanych castic)
   • MEED, RHEED a LEPD - principy a užiti
2. Rozptyl atomu a iontu
   • Difrakce atomu -interakce atomu s povrchem, teoreticke vypocty a modely, experimentalni zarizeni, aplikace (rozdeleni nabojove hustoty, chemisorpce vodiku, rekonstrukce, povrchy izolantu, nesoumeritelne vrstvy).
   • Rozptyl iontu (ISS) - LEIS, MEIS, HEIS (RBS) (princip, intenzita piku, studium vychylek atomu, rekonstruovany a relaxovany povrch, adsorbaty, ciste povrchy, rozhrani, epitaxe, povrchove tani)
3. Spektroskopicke metody.
   • UPS, XPS, AES strukturni informace (zdroj pro difrakci elektronu uvnitr latky)
   • SEXAFS a NEXAFS (princip metod, možnost studia lokalni struktury na neusporadanych latkach, studium vazeb a orientaci adsorbovanych molekul, koordinacni cisla; metody mereni, atomova a molekulova chemisorpce, struktura rozhrani pevna latka-vrstva)
4. Nektere dalši metody (ESDIAD, TSD, HREELS)
5. Mikroskopie povrchu.
   • FEM - princip, tunelovy jev, experimentalni zarizeni, rozlišeni, užiti
   • FIM - princip, pristroj, rozlišeni, obrazy atomu a poruch
   • STM - objev a vyvoj, princip, tunelovy proud, režimy mereni, rozlišeni, experimentalni vysledky (kovy, polovodice, vrstevnate materialy, atd., spektroskopicka mereni)
   • HRTEM - zakladni odlišnosti od konvencni TEM
6. Difrakce rentgenoveho zareni
   • dvoj- a trojkrystalova difraktometrie (zaklady difrakce v dokonalych krystalech, trojkrystalovy spektrometr, asymptoticka braggovska difrakce, epitaxni vrstvy - pnuti, složeni, hloubkove profily)
   • metody tecneho dopadu - glancing angle (totalni odraz, amorfni velmi tenke vrstvy na povrchu, implantovane vrstvy, povrchy), GID (grazing incidence diffraction)
   • metoda stojatych vln (sekundarni jevy pri absorpci rtg zareni, registrace fotoelektronu, fotoemise fluorescence, Comptonuv a teplotni difuzni rozptyl)
   • studium polykrystalickych vrstev -- strukturni zvlaštnosti tenkych vrstev, mechanicke vlastnosti, konvencni praškova difraktometrie (fazova analyza, mrižove parametry, textury, mikrodeformace ..), mereni zbytkovych napeti, Seemannuv-Bohlinuv difraktometr (srovnani, vyhody), priklady, nitridove vrstvy

LITERATURA

Prehledy metod

1. napr. Ludmila Eckertova : Physics of Thin Films. Plenum Press New York, London, SNTL Prague 1986
2. Ludmila Eckertova : Metody analyzy povrchu (Experimentalni metody fyziky pevnych latek, svazek 4) Katedra fyziky kovu, Praha 1982
3. K.N.Tu a kol. : Analytical Techniques for Thin Films New York 1986
4. H.Oeschner : Thin Films and Depth Profile Analysis. Springer Verlag 1984
5. K.H.Rieder : "Experimental Methods for Determining Surface Structures and Surface Corrugations" v Topics in Current Physics vol.41 - "Structure and Dynamics Of Surface I"
6. D.P.Wooduff, T.A.Delchar : Modern Techniques of Surface Science (1986) Cambridge University Press rusky preklad Sovremennyje metody issledovanija poverchnosti (1989) Mir. Moskva

Specialni literatura k tematum


1a   Surface Crystallography (1985).  John Wiley & Sons
1b  J.B.Pendry : Low Energy Electron Diffraction (1974)  Academic Press
1c   M.A. van Hove, S.Y.Tong : Surface Crystallography by LEED  (1979) Springer
1d   Surface Structures by LEED  (1981)  Plenum Press
1e   Springer Tracts in Modern Physics  v 91  (1982)  LEED Intensities - Experimental Progress and New
     Possibilities of Surface Structure Determination
1f   Progress in Surface Science  vol.4 (1974)  Pergamon Press
1g   J.Koukal : Difrakce pomalych elektronu. Dne¹ni stav a  vyhledy. Ces.cas.fyz. A34 (1984) n.4
1h   V.M.Ijevlev,L.I.Trusov,V.A.Cholmjanskij : Strukturnyje prevrašcenija v tonkich plenkach (1982)     	Metallurgija.  Moskva
1i   Ind.J.Phys. v.61A(1987) p.78-92. G.D.Nigam, S.Mitra    "Crystallography in two dimensions"


2a  Springer Series in Chemical Physics  vol.35   " Chemistry and Physics of Solid Surfaces - V."
     Springer 1984
     T.Engel : "Determination of Surface Structure Using Atomic  Diffraction"
     W.M.Gibson : "Determination by Ion Scattering of Atomic Positions at Surfaces and Interfaces"
2b   viz 1e T.Engel, K.H.Rieder : "Structural Studies of Surfaces with Atomic and Molecular Beam Diffraction"
2c   Progress in Surface Science vol.5 (1975) Pergamon Press
     S.L.Bernasek, G.A.Somorjai: "Molecular Beam Scattering from Solid Surfaces"


3a   viz 2a  J.Stohr :"Surface Crystallography by Means of
                       SEXAFS and NEXAFS"
3b   Principles, Techniques and Applications of EXAFS, SEXAFS and XANES (1984) John Wiley & Sons
3c   Synchrotron Radiation Research (1980) Plenum Press. New York
3d  EXAFS Spectroscopy, Techniques and Applications (1981)  Plenum Press. New York


4   viz 1a
4   Ces.cas.fyz.  A31 (1981) n.5 str.469


5a   E.Muller, T.T.Tsong : Field Ion Microscopy (1969)   Am.Elsevier Publ. New York
5b   viz 1f  E.W.Muller, T.T.Tsong : Field Ion Microscopy,
             Field Ionization and Field Evaporation.
5c   Ces.cas.fyz. A27 (1977) n.5, str. 460,501
5d   Ces.cas.fyz. A36 (1986) n.3 . K.Binnig, H.Rohrer prednaška  na EFS Praha 1984
5e   P.K.Hansma, J.Tersoff : "Scanning Tunneling Microscopy"   (review)  J.Appl.Phys. v.61 (1987),n.2
5f   C.F.Quate : "Vacuum tunneling : A new technique for microscopy". Physics Today (1986) n.8
5g   Physics Today (1987) n.1, str.17
5h   Ces.cas.fyz. v.40(1990) G.Binnig,H.Rohrer :"Rastrovaci  tunelovaci mikroskopie - od kolebky k dospelosti 
5i   Phys.Rev.Lett. v.51 (1983) p.1000
5j   Phys.Rev.Lett. v.52 (1984) p.656


6a   Z.G.Pinsker : Rentgenovskaja kristallooptika. (1982) Nauka. Moskva
6b   L.V.Azaroff : X-Ray Diffraction. (1974) McGraw-Hill
6c   C.R.Wie et al. :"Dynamical X-Ray Diffraction from non-uniform crystalline films."  J.Appl.Phys. v.59(11)
                                                (1986)  p.3743
6d   L.Nevot :"Grazing Incidence Method " . Revue Phys.Appl.  v.15 (1980) p.761
6e   A.M.Afanasjev, P.A.Alexandrov, R.M.Imamov : Rentgenodifrakcionnaja diagnostika submikronnych 	slojev. (1989) Nauka. Moskva
6f   Progress in Crystal Growth and Characterization  vol.18  (1989) "Recent advances in X-ray  	characterization of materials II". A.Segmuller, I.C.Noyan, V.S.Speriosu : "X-ray diffraction studies of 	thin films and multilayer structures"
6g   Advances in X-Ray Analysis. vol.29 (1986) p.353,  A.Segmuller :"Characterization of epitaxial films by X-	ray diffraction"
6h   R.Feder, B.S.Berry :"Seemann-Bohlin X-Ray Diffractometer  for Thin Films" J.Appl.Cryst. v.3 (1970) 	p.372
6i   W.Parrish, M.Mack  Acta Cryst. v.23 (1967) p.687
6j   J.E.Sundgren et al. :"A review of the present state of art in hard coatings grown from the vapor phase"
     J.Vac.Sci.Technol. A4 (1986) p.2259
6k   J.E.Sundgren et.al. :"Microstructural and microchemical characterization of hard coatings". 	J.Vac.Sci.Technol.  A4(1986) p.2770



7a   Treatise on Materials Science and Technology. vol.19a
                                           Academic Press
     C.R.Houska : "The investigation of Composition Variation
     by Diffraction "
7b   Thin Solid Films v.25 (1975) p.451 . C.R.Houska : "X-ray
                               examination of diffused films"