STRUCTURAL STUDY OF METAL-METALLOID AND METAL-METAL MULTILAYERS

T. Pusztai1, J. Balogh2, L. Bujdosó2, L. Tóth3

1 Department of Solid State Physics, Eötvös Loránd University, H-1088 Budapest, Múzeum krt. 6-8, Hungary
2 Research Institute for Solid State Physics, H-1525 Budapest, P.O.Box 49, Hungary
3 Research Institute for Technical Physics, H-1525 Budapest, P.O.Box 49 Hungary

Multilayers are used in more and more areas of technology. In order to control the physical parameters of these layers, it is crucial to know their structure, both in the mesoscopic and in the atomic level. In this study we report structural studies on metal-metalloid and metal-metal multilayers using a combination of several methods, such as grazing incident x-ray diffraction, Mössbauer spectroscopy, and transmission electron microscopy. In the investigated multilayers an amorphous interface is formed between the elemental layers during the sample deposition. We show that local methods like Mössbauer spectroscopy give unique information on the concentration distribution in the amorphous phase, which cannot be obtained from diffraction experiments. Although precise atomic positions cannot be determined, the mesoscopic structure can be characterized, and the results of the three types of measurements can be explained in a coherent model.

  1. J. Balogh et al, Appl. Phys. A 65, pp 23-27 (1997)
  2. J. Balogh et al, Materials Science Forum, Vols. 179-181, pp 775-780 (1995)